| 摘要 |
PROBLEM TO BE SOLVED: To provide a fluid pump device reduced in a power loss generated when a check valve for performing exhaust at an intermediate stage is opened.SOLUTION: A check valve storage chamber 41 is connected to a third pump chamber 13 as the intermediate stage of a vacuum pump 1 through an internal passage 36. A forth pump chamber 14 is connected to the check valve storage chamber 41 through an internal passage 37. When the bypassing check valve 51 in the check valve storage chamber 41 is closed, gas compressed in the third pump chamber 13 is transferred to the fourth pump chamber 14 through the internal passage 36, check valve storage chamber 41 and internal passage 37. Meanwhile, when the bypassing check valve 51 is opened, the gas compressed in the third pump chamber 13 is discharged from the check valve storage chamber 41 to the outside of the vacuum pump 1. When the bypassing check valve 51 is opened, a suction amount regulation section 56 formed integrally with a check valve body 52 restricts the amount of gas led to flow from the check valve storage chamber 41 into the internal passage 37. |
