发明名称 |
Process for Producing Trichlorosilane and Tetrachlorosilane |
摘要 |
A process for reducing waste and increasing yield of chlorosilane monomers is performed by cracking polychlorosiloxane and polychlorosilane by-products generated during production of trichlorosilane useful for the manufacture of polycrystalline silicon.
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申请公布号 |
US2011250116(A1) |
申请公布日期 |
2011.10.13 |
申请号 |
US200913127987 |
申请日期 |
2009.11.17 |
申请人 |
HARDER PATRICK JAMES;TSELEPIS ARTHUR JAMES |
发明人 |
HARDER PATRICK JAMES;TSELEPIS ARTHUR JAMES |
分类号 |
C01B33/107 |
主分类号 |
C01B33/107 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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