发明名称 METHOD AND APPARATUS FOR CONTROLLING LIGHT BANDWIDTH
摘要 An apparatus includes a light source that produces a light beam, a bandwidth measurement system, a plurality of bandwidth actuation systems, and a control system. Each bandwidth actuation system includes one or more bandwidth actuators and each bandwidth actuation system is connected to an optical feature that is optically coupled to the produced light beam and operable to modify the connected optical feature to select a bandwidth within a bandwidth range of the produced light beam. The control system is connected to the bandwidth measurement system and to the plurality of bandwidth actuation systems. The control system is configured to switch between activating and operating a first bandwidth actuation system and activating and operating a second bandwidth actuation system independently and separately of activating and operating the first bandwidth actuation system based on a provided bandwidth measurement and a selected target bandwidth.
申请公布号 US2011249691(A1) 申请公布日期 2011.10.13
申请号 US20100755772 申请日期 2010.04.07
申请人 CYMER INC. 发明人 O'BRIEN KEVIN M.;TRINTCHOUK FEDOR B.
分类号 H01S3/10 主分类号 H01S3/10
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