| 摘要 |
An electronic device test apparatus which can optimize throughput and costs is provided. An electronic device test apparatus 1 comprises: a test cell cluster 10 having cell groups 11A to 11H each of which has a plurality of test cells 20; and a conveyor apparatus 30 supplying test carriers to a plurality of the test cells 20, and each of the test cell 20 has: contactors 215; a flow path 221 connected to a vacuum pump 25 and reducing pressure in a recess 211 of a pocket 21 so as to bring external terminals 73 and the contactors 215 into contact; and a test circuit for running a test on an electronic circuit formed into a die 90.
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