发明名称 METHOD FOR REPAIRING CNT-ANTISTATIC-PROCESSED WORKING STAGE
摘要 The present invention provides a method for repairing a CNT-antistatic-processed working stage. The method for repairing a CNT-antistatic-processed working stage of the present invention comprises a washing step, a preheating step, a coating step, and a heat-hardening step. The washing step is to wash a specific part needed to be repaired in the working stage. The preheating step is to preheat the specific part. The coating step is to coat the specific part with a repair solution containing carbon nanotube. The heat-hardening step is to heat-harden the specific part coated with the repair solution. According to the present invention, it is possible to rapidly and easily repair the CNT-antistatic-processed working stage on the scene.
申请公布号 WO2011126292(A2) 申请公布日期 2011.10.13
申请号 WO2011KR02397 申请日期 2011.04.06
申请人 TOPNANOSYS,INC;PARK, DOHYEONG;LEE, DONGMYEON;KOO, SONGCHANG 发明人 PARK, DOHYEONG;LEE, DONGMYEON;KOO, SONGCHANG
分类号 H01L21/67 主分类号 H01L21/67
代理机构 代理人
主权项
地址