摘要 |
Disclosed is an optical apparatus, which can suppress light quantity loss due to, for instance, an overlap error of illuminating fields, and which can illuminate a surface to be illuminated under required illuminating conditions at a high light efficiency. The optical apparatus, which illuminates, with light emitted from a light source, a first region having a longer length in the second direction that intersects the first direction than the length in the first direction, is provided with: a collector optical member, which is disposed in an optical path between the light source and the first region, collects the light emitted from the light source, and forms a second region on the predetermined surface, said second region having a longer length in the fourth direction that intersects the third direction than the length in the third direction; and a first fly's eye optical member, which is provided within a predetermined surface that includes the second region, and which has a plurality of first optical elements that guide, to the first region, light transmitted from the collector optical member. |