| 摘要 |
PROBLEM TO BE SOLVED: To provide a coated member having excellent oxidation resistance, friction sliding characteristic or the like even under high-temperature conditions.SOLUTION: The coated member includes a base material and an amorphous carbon film (DLC-Si film) which coats at least a part of the base material and comprises Si, H and the balance C. In the amorphous carbon film, the Si concentration in a vicinity of its surface is higher than the Si concentration in a vicinity of an interface with the base material. The amorphous carbon film can keep hardness even in the high-temperature range since the Si concentration in a vicinity of its surface is high, and can express adequate toughness and high adhesiveness even in the high-temperature range since the Si concentration in a vicinity of the interface with the base material is low. The coated member expresses the consistent heat resistance by the synergetic action of these factors. The DLC-Si film has preferably a gradient composition in which the Si concentration on the surface side is 8-30 atom%, and the Si concentration on the base material side is gradually increased. |
