MEMS ELEMENT AND METHOD FOR MANUFACTURING THE SAME

摘要

PROBLEM TO BE SOLVED: To prevent an electric field-shielding base board from colliding with a leaf spring to improve the yields of elements.SOLUTION: An MEMS element includes: a mirror base board 100; an electrode base board 200 which is arranged facing the mirror base board 100; an electric field-shielding base board 300a which is joined to the mirror base board 100; a leaf spring 105a which is a movable electrode formed with its displacement possible to the mirror base board 100; a leaf spring-driving electrode 201a which is a fixed electrode formed on the electrode base board 200; and a shielding electrode 302 which is formed on the surface of the electric field-shielding base board 300a on the opposite side to the mirror base board 100, and is inserted and fitted in the aperture part 101 of the mirror base board 100. A size in the horizontal direction of the electric field-shielding base board 300a is larger than the size in the horizontal direction of the aperture part 101, and the thickness of the shielding electrode 302 is equal to the depth of the aperture part 101 or smaller than the depth of the aperture part 101.