| 摘要 |
PROBLEM TO BE SOLVED: To provide a surface treatment device capable of considerably reducing the device cost while increasing the pressure in a decompression chamber at the atmospheric pressure in a short time.SOLUTION: The surface treatment device 1 for performing the surface treatment of an object to be treated by bringing a raw gas into contact with the object gas under the vacuum state includes a decompression chamber 2 having an openable/closable door 3, an exhaust pipe 10 connected to the decompression chamber 2, a decompression mechanism 60 which is connected via a vacuum valve mechanism 61 provided on the exhaust pipe 10 to decompress the decompression chamber 2 to the predetermined pressure, and a pressure-increasing mechanism 11 for increasing the pressure in the decompression chamber 2 by supplying compressed air to the decompression chamber 2. The pressure-increasing mechanism 11 includes a pressure-regulating mechanism 12 for regulating the pressure of the compressed air to be supplied from an air compressor, an air tank 13 for accumulating the pressure-regulated air, a compressed air supply pipe 14 for connecting the air tank 13 to the exhaust pipe 10, and a valve mechanism 15 for opening/closing the compressed air supply pipe 14. |
