IMPRINT APPARATUS, MOLD, AND METHOD OF MANUFACTURING ARTICLE

摘要

PROBLEM TO BE SOLVED: To improve the throughput and/or the yield of imprinting while suppressing complication of the structure of an imprint apparatus.SOLUTION: The imprint apparatus applies resin onto a substrate and cures the resin in a state of pressing a mold to the resin. The mold has a porous layer. The imprint apparatus includes a chuck holding the mold and a supply part supplying gas to the porous layer to discharge the gas from the porous layer held by the chuck.