SEMICONDUCTOR DEVICES COMPRISING ANTIREFLECTIVE CONDUCTIVE LAYERS AND METHODS OF MAKING AND USING

摘要

A semiconductor device includes a semiconductor substrate and an antireflective conductive layer. The antireflective conductive layer includes a metal layer disposed on the semiconductor substrate and defining at least one array of apertures through the metal layer. Each of the apertures has a width of no more than 5 μm and a distance between each aperture and its nearest neighboring aperture is no more than 10 μm. The antireflective conductive layer also includes a solid material filling each of the apertures, wherein the solid material has an index of refraction of at least 1.1.