| 摘要 |
A focus ring surrounds an outer periphery of a substrate mounted on a mounting table having a temperature control mechanism and includes a contact surface which comes into contact with the mounting table and a heat transfer sheet formed on the contact surface. The heat transfer sheet contains an organic material and a heat transfer material mixed with the organic material, and has a film thickness larger than or equal to about 40 μm and smaller than about 100 μm. |
