| 摘要 |
<p>Even when warping occurs in a diaphragm area of a substrate mounted with heater resistors and temperature-sensitive resistors, the disclosed thermal flow sensor decreases the signal distortion in a bridge circuit connected to the temperature-sensitive resistors caused by said warping. Provided with a substrate, a diaphragm (13) formed on the substrate, and a heater resistor (2) and temperature detection resistors (7-10) formed on the diaphragm, the disclosed thermal flow sensor detects the flow amount of the fluid to be measured by means of heating the heater resistor. Strain detection resistors (11, 12) are formed upstream and downstream of the diaphragm heater resistor in the flowpath of the fluid to be measured, and the amount of strain generated on the diaphragm is detected by means of the stress detection resistors. On the basis of the amount of stress detected, distortion compensation is performed for the flow amount signal detected by the aforementioned heater resistor and the aforementioned temperature detection resistors.</p> |
