| 摘要 |
PROBLEM TO BE SOLVED: To provide a compacting apparatus for producing a silicon powder compact serving as a raw material for a polycrystalline silicon ingot, and a silicon powder compacting method using the same.SOLUTION: The compacting apparatus 1 comprises a die 4 as a pressurization vessel, an upper punch 2 as a part of a pressure applying unit, and a lower pressurization vessel in which a lower punch 3 and a base 5 are integrated. In the die 4, the upper punch 2 is disposed in an upper part. The upper punch 2 has an organic resin O-ring 6a at the tip. An organic resin O-ring 6b is attached to the lower punch 3. A filtration sheet 13 is disposed on the upper surface of the lower punch 3. In the lower punch 3 and the base 5, four drainage paths 9 are formed and connected to a drain outlet 10. The drain outlet 10 is connected to a water sucking unit. The water sucking unit 7 is composed of a water sucking pipe 11, a suction filtration bottle 12 and an oil rotation vacuum pump 8. |
