| 摘要 |
PROBLEM TO BE SOLVED: To provide a heat treatment device capable of suppressing increase in size of a device even when a size of a treated work is increased, and shortening a time necessary for carrying in and out the work to a process tube.SOLUTION: A vertical furnace 10 includes at least a boat 22 and an elevating mechanism 26. The elevating mechanism 26 is constituted to move the boat 22 to a plurality of positions including a first position where the work 20 is disposed inside the process tube 16 and a second position where the work 20 is disposed outside of the process tube 16. The boat 22 includes a closing plate 224 disposed above it and constituted to pass through an opening section 188. The closing plate 224 is disposed in the opening section 188 to close the opening section 188 when the boat 22 is disposed on the second position. |
