| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for manufacturing an anneal processed body for irradiating a workpiece with a patterned laser beam, by uselessly and efficiently utilizing a laser beam.SOLUTION: The method for manufacturing an anneal processed body, which irradiates a workpiece 100 with a patterned laser beam, to execute laser annealing of the workpiece includes the steps of deflecting a part of the laser beam 10 to be emitted to the workpiece 100 and separating it into a patterned second laser beam 12; irradiating the workpiece 100 with the laser beam from which the second laser beam 12 is separated, as a patterned first laser beam 11; and irradiating the workpiece 100 with the second laser beam 12 so that the irradiation position and/or the irradiation time are/is different from the first laser beam 11. |
