发明名称 SHUTTER DEVICE OF VERTICAL HEAT TREATMENT FURNACE
摘要 PROBLEM TO BE SOLVED: To provide a shutter device of a vertical heat treatment furnace capable of reducing the weight of a shutter while suppressing thermal deformation.SOLUTION: A shutter device 23 of a vertical heat treatment furnace 10 is equipped with a shutter 25 that opens/closes an opening provided to a lower end of a furnace body 11, and a drive mechanism 24 which drives opening/closing of the shutter 25. A recessed part 33 is formed at a portion of the shutter 25 that corresponds to the central part of the furnace body 11, the recessed part being so recessed as to come away from the inside of the furnace body 11 for suppressing thermal deformation of the shutter 25.
申请公布号 JP2011204747(A) 申请公布日期 2011.10.13
申请号 JP20100068155 申请日期 2010.03.24
申请人 KOYO THERMO SYSTEM KK 发明人 URASAKI YOSHIHIKO;KASATSUGU KATSUNAO
分类号 H01L21/31 主分类号 H01L21/31
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