| 摘要 |
PROBLEM TO BE SOLVED: To provide a constitution method as a composite charged particle beam device capable of preparing a TEM (Transmission Electron Microscope) sample efficiently by using a gas ion beam device, an FIB (Focused Ion Beam) and a SEM (Scanning Electron Microscope).SOLUTION: The composite charged particle beam device includes an FIB lens barrel 1, a SEM lens barrel 2, a gas ion beam lens barrel 3, and a rotary sample stage 9 having a eucentric tilt mechanism and a rotation axis 10 perpendicular to a eucentric tilt axis 8. The device has an arrangement wherein a focused ion beam 4, an electron ion beam 5 and a gas ion beam 6 cross at one point each other, and the axis of the FIB lens barrel 1 and the axis of the SEM lens barrel intersect the eucentric tilt axis 8 orthogonally, respectively, and the axis of the FIB lens barrel 1, the axis of the gas ion beam lens barrel 3 and the eucentric tilt axis 8 are located in the same plane. |
