发明名称 SEMICONDUCTOR DEVICE AND METHOD OF INSPECTING THE SAME
摘要 PROBLEM TO BE SOLVED: To confirm operation of a circuit part to be inspected at desired timing in a semiconductor device including a circuit for inspection.SOLUTION: The semiconductor device includes a circuit part to be inspected and an inspection circuit part. The inspection circuit part includes a signal input part, a comparison part, and a control circuit part. The control circuit part is connected to the signal input part, the comparison part, and the circuit part to be inspected. The signal input part obtains an inspection signal or an inspection expectation value, and transmits the inspection signal to the control circuit part. The control circuit part transmits the inspection signal to the circuit part to be inspected, obtains an operation signal output by the circuit part to be inspected on the basis of the inspection signal, and transmits it to the comparison part. The comparison part outputs a comparison result obtained by comparing the inspection expectation value with the operation signal on the basis of a synchronization signal.
申请公布号 JP2011203003(A) 申请公布日期 2011.10.13
申请号 JP20100068505 申请日期 2010.03.24
申请人 NEC CORP 发明人 NAKAGAWA MOTOHIRO;NOSE KOICHI
分类号 G01R31/28;H01L21/822;H01L27/04 主分类号 G01R31/28
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