| 摘要 |
PROBLEM TO BE SOLVED: To provide a device for specifying the charge quantity of charged particles capable of minutely measuring or specifying the charge quantity of the charged particles with a particle size of several μm or above without making the device large-scale.SOLUTION: The device 100 for specifying the charge quantity of the charged particles is equipped with an introducing part 10 equipped with a particle sensor for taking in gas A containing the charged particles (p) and for sensing the charged particles (p), a flow velocity adjusting part 30 for adjusting the flow velocity of the gas A and allowing the gas A stand still at least in a detection part 20a, the detection part 20a having an electric field forming mechanism, an irradiation mechanism and a light detection mechanism, and a control part 40 for receiving the charged particle data transmitted from the particle sensor to control the operation of the flow velocity adjusting part 30 and constituted so that the electric field forming mechanism is operated in the detection part 20a to form an electric field in the detection part 20a, the charged particles (p) are moved by the acting electric field and gravity and the charge quantity of the charged particles (p) is specified from the detection data of the scattered light emitted from the moving charged particles (p). |
