TRANSPARENT CONDUCTIVE ZINC OXIDE FILM, PROCESS FOR PRODUCTION THEREOF, AND USE THEREOF

摘要

A transparent conductive zinc oxide film which contains Ti, Al and Zn at an atomic ratio that fulfils the requirements represented by formulae (1), (2) and (3), has multiple surface textures having different sizes on the surface thereof, and has a surface having a center line average surface roughness (Ra) of 30 to 200 nm, wherein the average value of the widths of the surface textures is 100 nm to 10 µm. 0.001 = Ti/(Zn+Al+Ti) = 0.079 ...(1) 0.001 = Al/(Zn+Al+Ti) = 0.079 ...(2) 0.010 = (Ti+Al)/(Zn+Al+Ti) = 0.080 ...(3)