SUBSTRATE PROCESSING DEVICE

摘要

The disclosed substrate processing device is provided with: a substrate supply unit that supplies substrates such that the substrate, formed in a band shape, is in the state of being stood up in the direction of the shorter dimension thereof; a substrate processing unit that has a conveyance unit that conveys the substrate supplied from said substrate supply unit in the standing state, and a plurality of processing units that are disposed along the substrate conveyance route of said conveyance unit and that process the surface to be processed of the standing substrate; and a substrate retrieval unit that retrieves the substrate-processed by said substrate processing units-in the standing state.