| 摘要 |
PROBLEM TO BE SOLVED: To provide an analyzer capable of corresponding to the analysis of many kinds of components, while suppressing increase in the scale of the analyzer.SOLUTION: The analyzer 1 is equipped with an emission unit 10, a transmission type spectral filter 22, a photodetector 23 and an analysis unit 31. The spectral filter 22 is equipped with a light pervious substrate, a plurality of the protruded units formed on one side of the substrate from a first metal material and metal films formed from a second metal material having a refractive index higher than that of the first metal material so as to cover one side of the substrate along with the protruded units. The protruded units are arranged so that the metal films present between the protruded units may serves as a diffraction lattice, and the protruded units serves as waveguides. The lattice cycle of the diffraction lattice, the height of the protruded units and the thickness of the metal films are set to values different at each unit so that the wavelength of the transmitted light of the spectral filter changed at eachunit. The photodetector 23 is arranged so that respective light detection elements 24 detects the transmitted light of the spectral filter. The analyzing unit 31 acquires the spectrum of a target 40 from the output signals of the light detection elements 24. |
