发明名称 PHOTOSENSITIVE RESIN COMPOSITION
摘要 PROBLEM TO BE SOLVED: To provide a photosensitive resin composition for a photospacer having superior alkali developability, exposure sensitivity and resolution, a cured product thereof exhibiting superior adhesion to a substrate and superior elastic recovery characteristics even when a low temperature treatment is adopted.SOLUTION: The photosensitive resin composition is an alkali-developable negative photosensitive resin composition (Q) for a photospacer comprising a polyfunctional (meth)acrylate monomer (A) containing various acid groups or salts thereof, a photoradical polymerization initiator (B), a cationic polymerizable compound (C) having two or more epoxy groups and/or alkoxy groups in a molecule thereof, a siloxane compound (D) having two or more hydrolyzable alkoxy groups, and an acid generator (E), wherein a photospacer formed by post-baking at ≤200°C a cured product of the composition by light irradiation shows an elastic recovery rate of ≥50%.
申请公布号 JP2011203579(A) 申请公布日期 2011.10.13
申请号 JP20100071891 申请日期 2010.03.26
申请人 SANYO CHEM IND LTD 发明人 HASEGAWA SHINPEI;TOKUNAGA HIRONOBU
分类号 G03F7/027;G02B5/20;G02F1/1339;G03F7/004;G03F7/075;G03F7/40;H01L51/50 主分类号 G03F7/027
代理机构 代理人
主权项
地址