| 摘要 |
PROBLEM TO BE SOLVED: To provide a substrate processing device allowing normal completion according to the contents of an alarm recipe regardless of occurrence of an error in execution of a process recipe to execute the alarm recipe.SOLUTION: The substrate processing device is configured that when the process recipe stored in a process recipe storage unit is executed and an alarm is detected in execution of the process recipe, the alarm recipe stored in an alarm recipe storage unit is executed based on the detected alarm, and when the alarm recipe is executed in execution of the process recipe, whether the process recipe is normally completed or abnormally completed is determined based on a set content storage unit in which whether the process recipe is to be normally completed or abnormally completed is set in advance. |
