发明名称 Thin film transitor, fabrication method of the same, and display device having the same
摘要 A thin film transistor, a method of manufacturing the same, and a display device including the same, the thin film transistor including a substrate; a polysilicon semiconductor layer on the substrate; and a metal pattern between the semiconductor layer and the substrate, the metal pattern being insulated from the semiconductor layer, wherein the polysilicon of the semiconductor layer includes a grain boundary parallel to a crystallization growing direction, and a surface roughness of the polysilicon semiconductor layer defined by a distance between a lowest peak and a highest peak in a surface thereof is less than about 15 nm.
申请公布号 US2011248279(A1) 申请公布日期 2011.10.13
申请号 US20110929733 申请日期 2011.02.11
申请人 PARK JONG-HYUN;YOU CHUN-GI;PARK SUN;HANG JIN-HEE;LEE YUL-KYU 发明人 PARK JONG-HYUN;YOU CHUN-GI;PARK SUN;HANG JIN-HEE;LEE YUL-KYU
分类号 H01L29/786;H01L21/336 主分类号 H01L29/786
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