发明名称 SPECIMEN PROCESSING APPARATUS AND METHOD THEREOF
摘要 An apparatus and a method of processing a specimen includes a final analysis specimen that is manufactured by sequentially performing specimen processing processes using a laser beam with respect to an initial laminate specimen loaded on a stage. As a result, the final specimen manufacturing time may be reduced and the quality of the final specimen may be improved.
申请公布号 US2011250734(A1) 申请公布日期 2011.10.13
申请号 US201113083985 申请日期 2011.04.11
申请人 SAMSUNG ELECTRONICS CO., LTD. 发明人 CHOI SEUNGHO;BYUN GWANGSEON;LEE SUNYOUNG;LEE KYUNGWOO;LEE EUNGOO;KIM HONGSHIK
分类号 H01L21/02 主分类号 H01L21/02
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