| 摘要 |
PROBLEM TO BE SOLVED: To provide the shape capable of suppressing disconnection and the like of a heating element, and further suppressing deformation of a holding body due to self weight and the like of the heating element.SOLUTION: This substrate treatment device includes a treatment chamber disposed in a heating chamber for treating a substrate, and a heating device for heating the inside of the heating chamber. The heating device includes the heating element 42 configured so that a plurality of peak sections 42a and trough sections 42b are lined respectively at upper and lower ends and its both ends are fixed, a heat insulator 33 configuring a part of the heating chamber and disposed on an outer periphery of the heating element 42, and a holding body 41 fixed to the heat insulator 33 and holding the heating element 42, at least a part of the peak sections 42a of the heating element 42 is bent to a heat insulator 33 side, and the heat insulator 33 includes a projecting section 51 projecting toward a heating element 42 side at a part opposing to the trough sections 42a of the heating element 42 and supporting the holding body 41. |
