LAMINATED STRUCTURE WITH MOVABLE SECTION

摘要

PROBLEM TO BE SOLVED: To achieve a structure with a first movable section displaced orthogonal to a substrate surface and a second movable section displaced parallel to the substrate surface by using a laminated structure, and to reduce a manufacturing cost by letting the first and second movable sections have a nesting structure.SOLUTION: The laminated structure 10 is equipped with: the frame-like outer movable section 20; and the inner movable section 30 received in a frame of the outer movable section 20. A y-spring 21 is connected to the outer movable section 20, and the outer movable section 20 is supported displaceably in the y-axis direction by the y-spring 21 at a height at which the outer movable section 20 is separated from an outer substrate 81. A z-spring 31 is connected to the inner movable section 30, and the inner movable section 30 is supported displaceably in the z-axis direction by the z-spring 31 at a height at which the inner movable section 30 is separated from an outer substrate 81. The outer movable section 20 and the z-spring 31 have different heights from the substrate 81, and the z-spring 31 sterically crosses the outer movable section 20 at the height at which the z-spring 31 is separated from the outer movable section 20.