FABRICATION OF LARGE-AREA HEXAGONAL BORON NITRIDE THIN FILMS
摘要
<p>A hexagonal boron nitride thin film is grown on a metal surface of a growth substrate and then annealed. The hexagonal boron nitride thin film is coated with a protective support layer and released from the metal surface. The boron nitride thin film together with the protective support layer can then be transferred to any of a variety of arbitrary substrates.</p>
申请公布号
WO2011127258(A1)
申请公布日期
2011.10.13
申请号
WO2011US31544
申请日期
2011.04.07
申请人
MASSACHUSETTS INSTITUTE OF TECHNOLOGY;SHI, YUMENG;KONG, JING;HAMSEN, CHRISTOPH;LI, LAIN-JONG
