FILTER APPARATUS, FILTER HOUSING METHOD, AND EXPOSURE DEVICE

摘要

A filter apparatus is equipped with: a frame for holding filters; filter boxes that are disposed on at least parts of the sides of the frame, that face the end surface side of the frame, and that are equipped with shape-modified parts that are modified to the outside of the frame; and casings that house the filter boxes. The casings have positioning blocks that positions the frame by engaging with the shape-changing parts of the frame, and partition plates that are pressed by the end surfaces of the frame. The filters can be set in such a manner as to make positioning easy.