| 摘要 |
PROBLEM TO BE SOLVED: To provide a detection sensor and a material detection system which can achieve high sensitivity, and improving stability and reliability.SOLUTION: The stabilization of vibration characteristics in a vibrator 41 and the improvement of detection sensitivity in a sensitive film 42 are attained by operating a cooling element 152 and by cooling a vibrator chip 100 through a heat conductor 151, a chip package 120 and a PZT plate 130. A heat insulating material 170 covers the surrounding of the heat conductor 151 and the cooling element 152. An electrode part 121 is designed not to contact the outside air by a socket 140, a socket holder 141 and an electrode cover 142. Further, a chamber wall part 145 and a chamber body 146 are formed with a resin such as PEEK (polyether ether ketone) having a lower heat conductivity than a metal. |
