LASER DEVICE, EXTREME ULTRAVIOLET LIGHT GENERATION DEVICE, AND METHOD FOR MAINTAINING THE DEVICES

摘要

Provided is a laser device (1) which is installed within a predetermined space and on a predetermined floor area, the laser device includes: a master oscillator (11); at least one amplifier unit (MA) that amplifies a laser beam outputted from the master oscillator; at least one power source (D4, D5) unit that supplies excitation energy to the at least one amplifier unit; and a movement mechanism which enables at least one among the at least one amplifier unit and the at least one power source unit to be moved in a direction parallel with a floor surface.