发明名称 MASTER FOR PRODUCING STAMPER
摘要 <p>Disclosed is a master for producing a stamper. A master (10) comprises: a substrate (40) including a first material (20); a region which includes a second material (30) and is formed on the surface of the substrate (40); and protrusions (50) which are formed on the surface of the substrate (40). The first material (20) is silicon, and the second material (30) is selected from silicon oxide, aluminium oxide, titanium oxide and glass.</p>
申请公布号 WO2011125099(A1) 申请公布日期 2011.10.13
申请号 WO2010JP02454 申请日期 2010.04.02
申请人 KABUSHIKI KAISHA TOSHIBA;KASHIWADA, SAORI;OHSAWA, YUICHI;ITO, JUNICHI;KAMATA, CHIKAYOSHI;KAMATA, YOSHIYUKI 发明人 KASHIWADA, SAORI;OHSAWA, YUICHI;ITO, JUNICHI;KAMATA, CHIKAYOSHI;KAMATA, YOSHIYUKI
分类号 G11B7/26 主分类号 G11B7/26
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