SINGLE-WAFER TYPE HEAT TREATMENT APPARATUS FOR SEMICONDUCTOR PROCESSING SYSTEM,申请号EP20040734924-传众专利搜索

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发明名称	SINGLE-WAFER TYPE HEAT TREATMENT APPARATUS FOR SEMICONDUCTOR PROCESSING SYSTEM
摘要
申请公布号	EP1648022(A4)	申请公布日期	2011.10.12
申请号	EP20040734924	申请日期	2004.05.26
申请人	TOKYO ELECTRON LIMITED	发明人	YAMAGA, KENICHI;NAKAO, KEN
分类号	H01L21/00;H01L21/027	主分类号	H01L21/00
代理机构		代理人
主权项
地址

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