| 摘要 |
An aspheric surface measuring apparatus (1) includes a sample holder mechanism (6, 7, 70) and an interferential optical mechanism (2, 3, 4, 8, 80), and performs optical interferometric measurement while rotating a sample (10) every time a measurement angle is varied. The sample holder mechanism has a first air spindle (70) for rotating the sample about a test surface axis and a first airslide (7) . The first airslide carries the sample orthogonally or parallel to the test surface axis. The interference optical mechanism has an interference optical system (2), a first imaging system (3), and a second imaging system (4), a second air spindle (80), and a second airslide (8). The second spindle revolves or turns the interference optical system and the first and second imaging systems integrally to change a measurement angle between the measurement optical axis and the test surface axis. The second airslide carries the second air spindle orthogonally to the moving direction of the first airslide.
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