| 摘要 |
PROBLEM TO BE SOLVED: To provide a floating unit capable of correcting a glass substrate to a planar shape, and a substrate inspection device. SOLUTION: This floating unit is constituted in such a way that a suction block 4 having a rectangular pad channel is provided by providing a pad wall 16 over the whole periphery of an outer peripheral fringe of a channel bottom part 15 which is adjacent to floating blocks 2, 3 for floating the glass substrate 24 by blowing air, is lower than the floating blocks 2, 3, and is provided with an air suction hole 17. COPYRIGHT: (C)2005,JPO&NCIPI |
