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发明名称
Method for revealing emerging dislocations in a crystalline germanium based material
摘要
申请公布号
EP2209137(B1)
申请公布日期
2011.10.12
申请号
EP20100354001
申请日期
2010.01.05
申请人
COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIESALTERNATIVES
发明人
SANCHEZ, LOIC;DEGUET, CHRYSTEL
分类号
H01L21/66
主分类号
H01L21/66
代理机构
代理人
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