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发明名称
PLASMA PROCESSING APPARATUS
摘要
申请公布号
KR20110112255(A)
申请公布日期
2011.10.12
申请号
KR20110086444
申请日期
2011.08.29
申请人
TOKYO ELECTRON LIMITED
发明人
SAITO HITOSHI;SATO RYO
分类号
H01L21/3065;H01L21/205;H05H1/46
主分类号
H01L21/3065
代理机构
代理人
主权项
地址
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