发明名称 |
Contamination-inspecting apparatus and detection circuit |
摘要 |
The detection part has: a subtraction module for calculating correction data from data of detection systems when a reference-voltage generation module applies a reference voltage to the detection systems; a data-holding module for holding the correction data; an addition module for making a correction of detection data; a comparison module for comparing the detection data with switching data; and a selector for switching data of the detection systems including data subjected to the correction according to the output of the comparison module.
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申请公布号 |
US8035071(B2) |
申请公布日期 |
2011.10.11 |
申请号 |
US20080116241 |
申请日期 |
2008.05.07 |
申请人 |
HITACHI HIGH-TECHNOLOGIES CORPORATION |
发明人 |
MAKUUCHI MASAMI;ORIHASHI RITSUROU;TAKAHASHI MASAYOSHI;LI WEN;IMAGAWA KENGO;JINGU TAKAHIRO |
分类号 |
G01N21/88 |
主分类号 |
G01N21/88 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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