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发明名称
Blowing pipe structure of sampling carrier
摘要
<p>따라서, 본 발명은 세정가스가 블로잉파이프 및 분출공을 통해서 용기본체 내부 표면에 골고루 분사되어 불순물의 이탈을 극대화시키고, 이로 인해 소량의 세정가스 및 빠른 세정시간을 통해 세정작업이 이루어질 수 있는 것이다.</p>
申请公布号
KR101071638(B1)
申请公布日期
2011.10.10
申请号
KR20090046678
申请日期
2009.05.27
申请人
发明人
分类号
G01N1/22;G01N1/34
主分类号
G01N1/22
代理机构
代理人
主权项
地址
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