| 摘要 |
FIELD: electricity. ^ SUBSTANCE: device for initiation of microwave discharge and creation of plasma refers to generation area of microwave-gas discharge plasma and can be used in wide range of plasma technologies using the plasma of gas microwave discharge. Device for initiation of microwave discharge and creation of plasma includes initiator arranged in gaseous medium, conducting surface-reflector and microwave emitter acting on initiator; at that, conducting electric vibrator is used as initiator. At that, initiator of microwave discharge is located parallel to conducting surface at distance h, which is considerably less than one fourth of wave length of the conducting surface. Conducting electric vibrator can be installed above conducting surface or on surface of radiotransparent dielectric material located between conducting surface and initiator. Device can contain any number of parallel initiators of microwave discharge, which are located at any specified distance from each other, but without electric contact between each other. ^ EFFECT: possibility of providing the required characteristics of generated microwave discharge plasma in wide dynamic operating range of microwave emission source. ^ 3 cl, 4 dwg |
