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发明名称
3D NAND FLASH MEMORY ARRAY SPLITTING STACKED LAYERS BY ELECTRICAL ERASE AND FABRICATION METHOD THEREOF
摘要
申请公布号
KR20110111166(A)
申请公布日期
2011.10.10
申请号
KR20100030588
申请日期
2010.04.02
申请人
SNU R&DB FOUNDATION
发明人
PARK, BYUNG GOOK;YUN, JANG GN
分类号
H01L21/8247;H01L27/115
主分类号
H01L21/8247
代理机构
代理人
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