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发明名称
METAL REFLECTING LAYER FOR EFFICIENCY IMPROVEMENT OF LASER LIFT-OFF PROCESS
摘要
申请公布号
KR20110110978(A)
申请公布日期
2011.10.10
申请号
KR20100030320
申请日期
2010.04.02
申请人
UNIVERSITY-INDUSTRY COOPERATION GROUP OF KYUNG HEE UNIVERSITY
发明人
KIM, HAN KI;CHOI, KWANG HYUK;CHOI, YOON YOUNG
分类号
C23C14/34;C23C14/14;H01L21/268;H01S3/00
主分类号
C23C14/34
代理机构
代理人
主权项
地址
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