发明名称 |
DEVICE FOR CHANGING PITCH BETWEEN LIGHT BEAM AXES, AND SUBSTRATE EXPOSURE APPARATUS |
摘要 |
A parallel glass which is a prism having a parallelogram-shaped cross section in an x-y direction, and parallel glasses which are prisms having a parallelogram-shaped cross section in the x-y direction and each include grooves formed in one surface in a z direction perpendicular to the x-y direction, are stacked in direct contact with each other such that the grooves are located on the inside, and light trying to enter the grooves is subjected is total reflection, thereby changing incident parallel beams with a pitch of 13 mm into emergent parallel beams with a pitch of 1 mm. |
申请公布号 |
HK1115919(A1) |
申请公布日期 |
2011.10.07 |
申请号 |
HK20080106172 |
申请日期 |
2008.06.03 |
申请人 |
HITACHI VIA MECHANICS LTD. (HITACHI BIAMEKANIKUSUKABUSHIKIKAISHA) |
发明人 |
YOSHITADA OSHIDA;YOSHITATSU NAITO;MITUHIRO SUZIKI;TSUYOSHI YAMAGUCHI;SHIGENOBU MARUYAMA |
分类号 |
G03F |
主分类号 |
G03F |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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