| 摘要 |
PROBLEM TO BE SOLVED: To provide a semiconductor optical waveguide element and a semiconductor optical waveguide array element in which coupling loss is low, variation in values is less, and crystal quality is satisfactory, and a method for manufacturing the same.SOLUTION: A flush type semiconductor optical wave guide element is formed on a substrate and includes a taper waveguide with a core layer in which width and thickness decrease like a taper from a first end toward a second end, and in the core layer, layer thickness ratio between layer thickness at the first end and layer thickness at the second end is 1.5-2.5, and the width at the second end is ≥0.5 μm ≤1.0 μm. |
