METHOD FOR INCREASING POLARIZATION ELECTRIC FIELD OF OXIDE FERROELECTRIC

摘要

PROBLEM TO BE SOLVED: To increase an electric field generated from spontaneous polarization while a lack of a constituent element such as oxygen and deterioration of surface crystallinity are eliminated so that spontaneous polarization of a ferroelectric of a surface and an inner part is easily reversed by an external electric field without deteriorating the spontaneous polarization.SOLUTION: The surface of an oxide ferroelectric is irradiated with an active oxygen such as an oxygen atom, an oxygen ion and ozone with low kinetic energy in the atmosphere where a gas element except for oxygen is satisfactorily reduced. When the surface is not exposed like an oxide ferroelectric thin film, the surface of the underlayer for forming the thin film is irradiated with the active oxygen before forming the thin film.