| 摘要 |
PROBLEM TO BE SOLVED: To provide a solid-state image pickup element for reducing a spurious signal due to charge generated on a surface of a photoelectric conversion part.SOLUTION: A charge transfer part includes a charge transfer path 3 formed in a semiconductor substrate and a charge transfer electrode 12 arranged to cover the charge transfer path 3. The photoelectric conversion part includes a charge reading region 4 which includes a first conduction-type lower impurity region 2a becoming a charge accumulation layer and a second conduction-type surface impurity region 2b and is formed between the charge transfer path and the photoelectric conversion part, and an element separation region 5 formed in a region except for the charge reading region 4 in a region between the charge transfer path 3 and the photoelectric conversion part. In the charge transfer electrode 12, a part of the charge transfer electrode 12 extends to an inside of the semiconductor substrate in at least a part of the region where the element separation region 5 is formed, and a barrier region 7 suppressing movement of the charge generated on the surface of the photoelectric conversion part to the element separation region is formed between the element separation region 5 in a region where the charge transfer electrode 12 extends to the inside of the semiconductor substrate and the surface impurity region 2b. |
