发明名称 |
TRANSMISSION ENERGY CONTAMINATION DETECTOR |
摘要 |
An energy contamination detection apparatus includes a membrane and a charge collection plate disposed at a distance from the membrane. The membrane is configured to receive an ion beam and allow a portion of the ion beam having energy levels above a desired energy level to pass therethrough toward the charge collection plate and absorb or reflect portions of the ion beam having energy levels at or below the desired energy level. A voltage source is electrically coupled to the charge collection plate for providing a bias voltage to the charge collection plate. A detection circuit is coupled to the charge collection plate and is configured to detect energy contamination based on an amount of charge collected on the charge collection plate.
|
申请公布号 |
US2011240847(A1) |
申请公布日期 |
2011.10.06 |
申请号 |
US20100750893 |
申请日期 |
2010.03.31 |
申请人 |
VARIAN SEMICONDUCTOR EQUIPMENT ASSOCIATES, INC. |
发明人 |
SINCLAIR FRANK |
分类号 |
H01J49/00 |
主分类号 |
H01J49/00 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|