发明名称 METHOD AND DEVICE FOR ALTERNATELY CONTACTING TWO WAFERS
摘要 A method and device for alternatively contacting two wafer-like component composite arrangements, in which two component composite arrangements, provided with contact metallizations on their opposing contact surfaces, are brought into a coverage position with their contact metallizations to form contact pairs, in which position the contact metallizations to be joined together are pressed against one another, the contact metalllizations being contacted by exposing the rear of one of the component composite arrangements to laser radiation, the wavelength of the laser radiation being selected as a function of the degree of absorption of the component composite arrangement, so that a transmission of the laser radiation through the component composite arrangement exposed to the laser radiation at the rear is essentially suppressed or an absorption of the laser radiation takes place essentially in the contact metallizations of one or both component composite arrangements.
申请公布号 US2011244651(A1) 申请公布日期 2011.10.06
申请号 US201113075046 申请日期 2011.03.29
申请人 发明人 ZAKEL ELKE;AZDASHT GHASSEM
分类号 H01L21/60;H01L21/50;H01L21/98;H01L23/10;H01L25/065;H01S5/02;H01S5/042;H01S5/40 主分类号 H01L21/60
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